Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
66 (1989), S. 5635-5636
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The synthesis of TiSi2 was obtained by continuous wave CO2-laser scanning of a two-layer structure of polycrystalline silicon and titanium on a silicon base. The characterization studies were performed by Rutherford backscattering, scanning electron microscopy, and four-point probe measurements. It was shown that the silicon cap layer prevents the oxidation of the titanium film and couples better the infrared laser radiation to the base due to its lower reflectivity, thus profitably enhancing processing efficiency.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.343673
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