ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract Deposition conditions yielding silicon nitride are calculated for a set of initial gaseous systems, by complex thermodynamic equilibria computations. The influence of temperature, total pressure and reactant gas ratios on the composition and yield of the condensed phase are shown for SiH4/NH3, SiCl4/NH3, SiBr4/NH3, Si(CH3)4/NH3 and SiH4/ CH4/NH3 systems. The interest of such calculations is to give an efficient approach for experimental studies of vapour-deposition systems.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01026987
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