Electronic Resource
Amsterdam
:
Elsevier
Microelectronic Engineering
14 (1991), S. 269-281
ISSN:
0167-9317
Keywords:
Cell model
;
Monte-Carlo methods
;
dry etching
;
microloading
;
simulation
;
surface processes
Source:
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:
Electrical Engineering, Measurement and Control Technology
Type of Medium:
Electronic Resource
URL:
http://linkinghub.elsevier.com/retrieve/pii/0167-9317(91)90012-3
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