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  • Electronic Resource  (1)
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    Electronic Resource
    Electronic Resource
    Microlithography: An overview (1994)
    New York, NY [u.a.] : Wiley-Blackwell
    Advanced Materials for Optics and Electronics 4 (1994), S. 55-74 
    Details
    ISSN: 1057-9257
    Keywords: Microlithography ; X-ray lithography ; Electron-beam lighography ; Photolithography lon-beam lithography ; Resists ; Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Physics
    Additional Material: 24 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/amo.860040203
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