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Ion-implantation system for near surface studies (1995)

Virdi, G. S. ; Nath, N.

[S.l.] : American Institute of Physics (AIP)

Review of Scientific Instruments 66 (1995), S. 5244-5248

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ISSN: 1089-7623

Source: AIP Digital Archive

Topics: Physics , Electrical Engineering, Measurement and Control Technology

Notes: An ion-implantation system designed and fabricated indigenously is described. It consists of a versatile ion source, Einzel lens system, EXH velocity filter, dose measuring equipment, and target chamber. The ion-implantation system fabricated has been used to prepare ion-implanted luminescent phosphors by implanting Sb+ ions into CaS. © 1995 American Institute of Physics.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.1146092

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