ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Measurements of electron density, electron density decay times, and floating potential in mixtures of methane, hydrogen, oxygen, and argon excited by a radio-frequency helical resonator discharge are reported. These studies were undertaken in a range of gas mixtures that correspond to those used for plasma deposition of diamond thin films. Measurements were performed using microwave cavity perturbation to measure electron density and decay times, and a Langmuir probe to measure electron density and floating potential. It is shown that there is little variation in electron density over the range of gas mixtures used, and that negative ion formation is not a significant process in these types of discharges.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.353355
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