ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A photolithographic technique for fabrication of very smooth and highly uniform metallic, free-standing, inductive meshes, is described. The fabrication process was developed in order to produce highly reflective, low-loss Fabry–Perot étalon elements for use in the infrared spectral region. The measured rms smoothness of the grids is typically ≤30 A(ring). Because of their nickel core, the mechanical strength of the grids is such that they can be easily stretched flat on stainless-steel rings.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1139733
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