ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Laser-collision induced fluorescence (LCIF) is the emission of light from states that have been populated by laser excitation and a subsequent collision. By simultaneously measuring the LCIF from two different states, it is possible to determine both the electron density and temperature of the low energy bulk electrons within a plasma. This method is described in detail and has been applied in the determination of the total, temporally averaged, and spatially resolved electron density in a rf (13.56 MHz) helium discharge in the Gaseous Electronics Conference reference cell. The rf discharge was operated at pressures P=33.3–133.3 Pa (0.25–1.0 Torr) and peak-to-peak voltages of Vpp=75–300 V were applied. We found the total electron density varied from 1.8×108 cm−3 at P=33.3 Pa and Vpp=75 V to 4.0×1010 cm−3 at P=133.3 Pa and Vpp=300 V. A comparison of results from different experiments has been made. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.363260
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