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Thermal conductivity of heavily doped low-pressure chemical vapor deposited polycrystalline silicon films (1988)

Tai, Y. C. ; Mastrangelo, C. H. ; Muller, R. S.

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 63 (1988), S. 1442-1447

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ISSN: 1089-7550

Source: AIP Digital Archive

Topics: Physics

Notes: The lateral thermal conductivity of heavily doped low-pressure chemical vapor deposited polycrystalline silicon films is measured using polycrystalline silicon microbridges elevated three micrometers above a silicon substrate. The bridges, lightly doped in their central regions and heavily doped elsewhere, are fabricated using a sacrificial silicon-dioxide layer and phosphorus out-diffusion from doped oxide. Voltage-current characteristics measured on the bridges both under high vacuum and in silicone oil are used to calculate lateral thermal conductivity in the polycrystalline silicon. The experimental values for the thermal conductivity of heavily doped polycrystalline silicon range from 0.29 to 0.34 W cm−1 K−1 and average 0.32 W cm−1 K−1. These values agree closely with results obtained by a second method that employs uniformly doped polycrystalline silicon bridges. In the second method, high-vacuum, voltage-current characteristics are measured and the indicated thermal conductivities for two samples are 0.29 and 0.30 W cm−1 K−1, respectively.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.339924

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Magnetic reversal rate and sea level (1988)

MULLER, R. A. ; MORRIS, D. E.

[s.l.] : Nature Publishing Group

Nature 332 (1988), S. 211-211

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ISSN: 1476-4687

Source: Nature Archives 1869 - 2009

Topics: Biology , Chemistry and Pharmacology , Medicine , Natural Sciences in General , Physics

Notes: [Auszug] SIRâ€”A negative correlation between the long-term eustatic sea level and the geomagnetic reversal rate for the past 150 million years (Myr) was recently analysed by Gaffin1. We had previously pointed out the existence of such a correlation23, although we did not do a complete ...