ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
A new type of sputtered neutral mass spectrometer, named SNART (Sputtered Neutral Analysis - Riken Type), was evaluated. SNART uses an argon plasma that is driven by an electron beam. The plasma is used for both sputtering of the sample and post-ionizing the sputtered neutral atoms. A depth profile of multilayered Ge/Si was taken by SNART to evaluate depth resolution. The quantitativeness of SNART was also checked using a stainless-steel sample. The results were compared with those by conventional SIMS and glow discharge optical emission spectrometry. The following features of SNART were confirmed: (1) high post-ionization efficiency; (2) high depth resolution; (3) high sputtering rate; (4) no matrix effect on post-ionization efficiency; and (5) high quantitativeness.
Additional Material:
5 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740141006
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