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Measurement of electron densities in electron cyclotron resonance plasmas for etching of III-V semiconductors (1991)

Pearton, S. J. ; Nakano, T. ; Gottscho, R. A.

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 69 (1991), S. 4206-4210

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ISSN: 1089-7550

Source: AIP Digital Archive

Topics: Physics

Notes: The average electron densities in CH4/H2/Ar and CCl2F2/O2 electron cyclotron resonance discharges typical of those used for etching InP, GaAs, and related materials have been measured approximately 4 cm downstream from the multipolar microwave source as a function of microwave power (50–300 W), additional radio-frequency power (10–50 W), pressure (1–20 mTorr), flow rate (30–90 standard cubic centimeters per minute) and gas composition. At 1 mTorr pressure and 10 W rf, the electron densities (and semiconductor etch rates) increase rapidly with microwave power, from 1.3×1011 cm−3 for 5CH4/17H2/8Ar and 6×1010 cm−3 for 28CCl2F2/2O2 discharges at 50-W microwave power, to 9×1011 cm−3 and 3×1011 cm−3, respectively at 300-W microwave power. At the highest microwave power levels (≥200 W) the InP and GaAs etched surface morphologies are rough due to preferential removal of one of the lattice constituents from each material. The electron densities in both types of discharge show moderate increases with increasing rf power level, pressure or higher Ar or O concentrations.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.348390

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Sensory nerve conduction velocities in the cutaneous afferents of the ulnar and peroneal nerves of the dog: Tissue temperature-dependent reference ranges (1990)

Miyamoto, A. ; Sumi, A. ; Ishido, Y. ; [et al.]

Springer

Veterinary research communications 14 (1990), S. 147-156

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ISSN: 1573-7446

Keywords: dog ; peroneal nerve ; sensory nerve conduction velocity ; tissue temperature ; ulnar nerve

Source: Springer Online Journal Archives 1860-2000

Topics: Medicine

Notes: Abstract Sensory nerve conduction velocities in the cutaneous afferents of the ulnar and peroneal nerves of the neurologically normal adult dog were determined by stimulation at stimulus intensities of 15, 20 and 25 V through subcutaneously placed electrodes and by the averaged evoked response technique. Stimulus intensities of 15 V for the ulnar nerve and 20 V for the peroneal nerve were adequate to measure the sensory nerve conduction velocities of these nerves. A linear relationship was seen between sensory nerve conduction velocity (y in m/s) and tissue temperature (x in °C) and the regression equations were expressed as follows: y=1.6x+12.3 at a stimulus intensity of 15 V for the ulnar nerve and y=2.0x−10.6 at 20 V for the peroneal nerve, respectively. The 95% confidence limits of the regressions of the sensory nerve conduction velocities against tissue temperature, obtained at a stimulus intensity of 15 V for the ulnar nerve or at a stimulus intensity of 20 V for the peroneal nerve, were proposed for a tissue temperature-dependent reference range to enable the clinician to evaluate graphically the sensory nerve conduction velocity in a diseased dog.