ISSN:
1432-0630
Keywords:
78.00
;
79.20.Nc
;
61.80.Jh
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract The depth distributions of damage of 1.4 MeV nitrogen molecular ions (N 2 + ) implanted into Si crystals at doses slightly below the value for amorphization have been measured by means of standard RBS/channeling for different directions of impact. These damage distributions were fed into our modified tomographic program “MO-TOR” [1, 2], by which we could reconstruct the spatial distributions of nuclear energy transfer. These distributions are compared with the three-dimensional theoretical prediction of a modified TRIM code [3]. It turns out that there exists a pronounced deviation from the purely ballistic damage distribution insofar as the reconstructed damage distribution is twice as broad in the lateral direction than predicted. This is essentially explained by deviations in flight geometry of molecular ions in comparison with single-atomic ones.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01538382
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