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Rectangular nanovoids in helium-implanted and thermally annealed MgO(100) (2000)

Kooi, B. J. ; van Veen, A. ; De Hosson, J. Th. M.

Woodbury, NY : American Institute of Physics (AIP)

Applied Physics Letters 76 (2000), S. 1110-1112

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ISSN: 1077-3118

Source: AIP Digital Archive

Topics: Physics

Notes: Cleaved MgO(100) single crystals were implanted with 30 keV 3He ions with doses varying from 1×1019 to 1×1020 m−2 and subsequently thermally annealed from 100 to 1100 °C. Transmission electron microscopy observations revealed the existence of sharply rectangular nanosize voids at a depth slightly shallower than the helium-implantation range. Monitoring of the defect depth profile and the retained amount of helium was performed by positron-beam analysis and neutron depth profiling, respectively. © 2000 American Institute of Physics.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.125954

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