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  • 2000-2004  (3)
  • 1985-1989
  • 2001  (3)
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  • 2000-2004  (3)
  • 1985-1989
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  • 1
    Electronic Resource
    Electronic Resource
    Texture transformations in reactive metal films deposited upon amorphous substrates (2001)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 89 (2001), S. 2635-2640 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We present results that demonstrate how interfacial reactions between a metal film and substrate during deposition affect microstructural evolution. In particular, we investigate Ti films deposited on amorphous SiO2 using ultrahigh vacuum transmission electron microscopy. Ti films were deposited in situ at room temperature and were examined using Auger electron spectroscopy and transmission electron microscopy. An initial [hk0] preferred orientation developed in films up to 2.5 nm in thickness. Films between 2.5 and 5.0 nm developed a [001] preferred orientation that persisted in films up to 20.0 nm thick. These data, in conjunction with Auger electron spectra and dark-field microscopy, suggest that growth of Ti films on SiO2 is directly affected by reactions at the Ti/SiO2 interface and that this reaction is responsible for the observed change in preferred orientation. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1337078
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    Evolution of nanoscale texture in ultrathin TiN films (2001)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 78 (2001), S. 2223-2225 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We investigate the evolution of texture and grain morphology in fine-grained TiN thin films using cross correlation of dark-field images obtained using annular objective apertures with radii that correspond to different low index TiN reflections. This technique enables parallel analyses of the orientations of thousands of grains, with a spatial resolution of order 10 nm. Preferred grain orientations were determined for 40 and 100 nm thick TiN layers grown on SiO2 by magnetically unbalanced reactive magnetron sputter deposition. We find that no single orientation is dominant in the 40 nm films but that a 〈100〉 texture has developed by the time these films reach 100 nm in thickness. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1360235
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    Paper (German National Licenses)
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  • 3
    Electronic Resource
    Electronic Resource
    Deep submicron microcontact printing on planar and curved substrates utilizing focused ion beam fabricated printheads (2001)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 78 (2001), S. 981-983 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Focused ion beam (FIB) fabrication of nanostructured "printheads" is used to extend applications of microcontact printing. Planar and curved printheads are fabricated with feature sizes less than 100 nm over fields of view of order 1 mm2, and transferred to target substrates with spatial resolution of order 200 nm. Analysis of the mechanical and ion optical stabilities of the FIB demonstrates that several hours of printhead fabrication time are possible with nanoscale precision. The rapid prototyping capability of this approach and the large depth of focus in the FIB enable rapid nanoscale patterning of a wide range of surface geometries. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1348308
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    Paper (German National Licenses)
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