ISSN:
1432-0630
Schlagwort(e):
Surface analysis
;
SIMS
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract The atomic mixing due to a knock-on cascade has much influence on the depth resolution of ion probe microanalysis. The preliminary experimental results support the assumption that the depth resolution due to this effect is determined by the competition of sputtering rate and creation rate of atomic displacement.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00883764
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