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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 91 (2002), S. 1797-1803 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The ionized physical vapor deposition technique uses a built-in rf coil to generate an inductively coupled plasma (ICP) between the target and substrate holder. For deposition of metallic species, a portion of the depositing atoms is ionized upon passing through the ICP. Since the input energy of the ICP is decoupled from the target, this technique also provides controllable ion bombardment during film growth, in terms of bombarding ion flux and ion energy. An ionized physical vapor deposition system has been studied and fully characterized. The ICP was characterized using a single passive probe method, and the plasma parameters, including electron temperature, plasma potential, and plasma ion density, have been measured. The ionization fraction of the depositing metal flux as a function of deposition parameters has been measured using the single passive probe method and a self-developed parallel-plates method. A simplified one-dimensional model was developed and compared favorably with the measured ionization fractions. © 2002 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    s.l. ; Stafa-Zurich, Switzerland
    Key engineering materials Vol. 257-258 (Feb. 2004), p. 165-170 
    ISSN: 1013-9826
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    Springer
    Soft computing 4 (2000), S. 186-192 
    ISSN: 1433-7479
    Keywords: Key words Genetic algorithms, Real-time control, Fuzzy logic control, Neural network control
    Source: Springer Online Journal Archives 1860-2000
    Topics: Computer Science
    Notes: Abstract This paper discusses the design of neural network and fuzzy logic controllers using genetic algorithms, for real-time control of flows in sewerage networks. The soft controllers operate in a critical control range, with a simple set-point strategy governing “easy” cases. The genetic algorithm designs controllers and set-points by repeated application of a simulator. A comparison between neural network, fuzzy logic and benchmark controller performance is presented. Global and local control strategies are compared. Methods to reduce execution time of the genetic algorithm, including the use of a Tabu algorithm for training data selection, are also discussed. The results indicate that local control is superior to global control, and that the genetic algorithm design of soft controllers is feasible even for complex flow systems of a realistic scale. Neural network and fuzzy logic controllers have comparable performance, although neural networks can be successfully optimised more consistently.
    Type of Medium: Electronic Resource
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