ISSN:
1432-0630
Keywords:
PACS61.80.Jh; 68.55.Ln
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract. We have studied the ion beam mixing of Pt marker layers which were 1 nm thick and buried 55 nm deep in Al. The samples were irradiated with Ne, Ar, Kr, Xe, and Pb ions with ion energies ranging from 75 to 600 keV and damage energy densities from 0.17 to 2.0 keV/nm. The depth distributions of both the implanted ions and the marker atoms were measured with Rutherford backscattering spectrometry. The experimental mixing efficiency of $\eta = 0.856(24)$ nm $^5$ /keV is about ten times as high as was to be expected from the ballistic model and the local spike models. We suggest a connection between this unexpectedly high mixing efficiency and the vanishing primary solid solubility of the marker element in the host matrix.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01579743
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