ISSN:
1432-0630
Keywords:
82.80.Pv
;
77.55.+f
;
85.50.Na
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract The deconvolution process of X-ray photoemission spectra for O 1s and Ru 3d, X-ray diffraction and Rutherford backscattering spectrometry reveal that the RuO x films (x = 2.0 – 2.2) deposited at a O2 partial pressure less than 30% show (110)-oriented grains, whereas the RuO x films (x = 2.3 – 2.4) deposited at a 40–50% O2 partial pressure show amorphous and (101)-oriented grains due to the excess O interstitials and RuO3 or RuO4. These differences in the crystal phases of RuO x influence the crystal structure of BaTiO3 deposited on these RuO x bottom electrodes, resulting in a higher dielectric constant and a lower dissipation factor for tetragonal BaTiO3/RuO x (x = 2.1) than amorphous BaTiO3/RuO x (x = 2.4).
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01575718
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