Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Physics of Plasmas
4 (1997), S. 1463-1467
ISSN:
1089-7674
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Variations of plasma density are investigated as a function of frequency of rf power in a helicon plasma source. Abrupt, almost step-like changes in the plasma density are observed during the frequency scans under various conditions of the input rf power, the argon gas pressure, and the magnetic field. It is found that the transition frequencies shift to the lower value region as the input rf power and/or the argon gas pressure is increased, and to the higher value region as the magnetic field is increased. The observed density transitions are compared with semianalytical calculations based on the power balance relation and it has been shown that the results are in good agreement. © 1997 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.872325
Permalink
| Library |
Location |
Call Number |
Volume/Issue/Year |
Availability |
