ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
This article will demonstrate the production and application of "mixed'' beams for a magnetically focused nuclear microprobe. A "mixed'' beam is defined as any two beams of ions of different species, or energy, or both that can be quickly and easily made to have the same magnetic rigidity (Rm) so that they transport, focus, and scan the same in a magnetic nuclear microprobe. Two techniques for the production of such beams will be presented. These methods include the extraction of different ions from the same source and scanning the terminal potential to produce the same Rm, and the use of a postacceleration stripper to change the charge state of one ion species to give it the same Rm as another ion species. The application of mixed beams to ion beam induced charge, scanning transmission ion microscopy, and ion microlithography will also be presented. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1147076
Permalink
