Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
70 (1997), S. 3464-3466
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Narrow and low-loss YBa2Cu3O7−δ (YBCO) transmission lines for use in multichip modules have been attempted to be developed. 18-cm-long YBCO coplanar transmission lines with widths down to 5 μm were prepared by a composite patterning process combining Ar-ion milling and wet-etching. The transmission losses of the packaged 5-, 10-, and 25-μm-wide lines, respectively, were −1.57, −0.85, and −0.55 dB at 20 GHz and 55 K. These values provide similar surface resistances of 0.59–0.80 mΩ at 20 GHz and 55 K. This indicates successful fabrication of a 5-μm-wide YBCO coplanar line without notable extrinsic loss increase resulting from process damage. The attenuation constants of these lines are approximately two orders of magnitude lower than for 10-μm-wide Cu microstrip lines. These results show that the YBCO coplanar lines with widths down to 5 μm have great potential for use in multi-chip modules. © 1997 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.119202
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