ISSN:
1572-8986
Keywords:
Composite films
;
plasma polymerization
;
RF sputtering
;
fluorocarbons
;
gold clusters
;
chemical structure
;
optical properties
;
aging
;
contact angle hysterisis
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Technology
Notes:
Abstract Gold-containing plasma-polymerized fluorocarbon thin films have been deposited in an RF glow discharge fed with hexafluoroethane, while a gold target was simultaneously sputtered. Tile temperatureT s and RF-induced biasU s of a third electrode, used as a substrate holder, were separately varied. The influence ofT s andU s on the plasma and file lihn characteristics were individually studied using actinometric optical emission spectroscopy, X-ray photoelectron spectroscopy, infrared spectroscopy, and measurements of optical transmission and surface contact angles. IncreasingU s (up to −200 V) andT s (up to 90°C) resulted in similar effects, namely a higher degree of cross-linking, higher gold concentration, better film stability with time, and increased wettability. A key role of the energy flux of particles impinging on the growing surface has been shown to account far the experimental results.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01447031
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