ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
Programs which have been developed to enable the rapid identification and quantification of elemental and molecular ions in SIMS and SNMS (Sputtered Neutral Mass Spectrometry) are described. The efficiency of these programs in identifying elemental species and quantifying concentration has been tested with amorphous silicon nitride films. Silicon doped with boron by ion implantation and a range of cobalt-silicon alloys have been used to test quantification in SIMS by the ‘relative sensitivity factor’ (RSF) method and quantification in SNMS respectively. The concentration obtained for boron in silicon by the RSF method gave good agreement with the concentration obtained from the ion implantation flux. Accurate quantification results were also obtained from the SNMS data.
Additional Material:
4 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740220118
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