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  • 1985-1989  (5)
  • 1975-1979  (3)
  • 1
    Electronic Resource
    Electronic Resource
    Depth-profiling of Cu-Ni sandwich samples by secondary ion mass spectrometry (1975)
    Springer
    Applied physics 8 (1975), S. 359-360 
    Details
    ISSN: 1432-0630
    Keywords: Secondary ion mass spectrometry ; Depth profiling ; Surface topography
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract SIMS depth profiles of copper-nickel thin film targets were measured with argon and nitrogen primary ions. While pronounced cone formation is observed in case of argon irradiation the erosion is much more uniform with nitrogen projectiles, probably due to formation of nitride surface layers.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00898370
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    Analysis of solids by secondary ion and sputtered neutral mass spectrometry (1985)
    Springer
    Applied physics 37 (1985), S. 211-220 
    Details
    ISSN: 1432-0630
    Keywords: 79.20.Nc ; 07.75.+h
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract A mass spectrometer is described, which allows the analysis of sputtered neutral and charged particles as well as of residual gas composition. This combined SIMS, SNMS, and RGA instrument consists of a scanning primary ion beam column, an electron impact ionizer, an electrostatic energy filter and an rf quadrupole mass analyzer. Various examples of surface and bulk analysis are presented which demonstrate the beneficial complementary features of these techniques. These are, in particular: a substantial reduction of the matrix effect and fewer complications with samples of low electrical conductivity in SNMS, and the possibility of measuring the depth distribution of gases included in small cavities in the solid in the SNMS/RGA mode. SIMS, on the other hand, allows in many cases higher detection sensitivities.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00614819
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    Paper (German National Licenses)
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  • 3
    Electronic Resource
    Electronic Resource
    On the chemical sputtering of oxygen-exposed molybdenum (1986)
    Springer
    Applied physics 40 (1986), S. 197-202 
    Details
    ISSN: 1432-0630
    Keywords: 79.20.Nc ; 68.90.+g
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The sputtering of oxygen-exposed molybdenum was studied by means of mass analysis of emitted neutral and charged particles. The irradiation was performed with 8 keV Ar+ ions at temperatures of 25° and 485°C. It was found that the enhanced sputtering yield at elevated temperature during oxygen exposure is due to beam-induced desorption of MoO2 and cascade sputtering of MoO. At this temperature considerable oxygen incorporation also takes place owing to recoil mixing and diffusion.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00616594
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    Paper (German National Licenses)
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  • 4
    Electronic Resource
    Electronic Resource
    The emission of neutral clusters in sputtering (1989)
    Springer
    Applied physics 48 (1989), S. 261-271 
    Details
    ISSN: 1432-0630
    Keywords: 79.20.Nc ; 36.40.+d
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The mass, angle, and energy resolved emission of neutral clusters in sputtering was studied for a variety of metals and semiconductors. The main phenomena and results are the following: (i) Cluster emission from a series of transition metals reveals a prominent contribution of clusters to the total flux of ejected particles but there is no simple scaling of cluster intensities with the average sputtering yields. With increasing number of constituents, relative intensities of neutral clusters decrease much faster than those of secondary-ion clusters. (ii) The relative intensities of clusters emitted from amorphous and crystalline semiconductors are identical, but the energy spectra of Ge n -clusters (n = 1–4) sputtered from Ge (111) peak at a slightly higher energy (1 eV) as compared to spectra taken from amorphous Ge. The intensities of all Ge n -clusters exhibit the same dependence on emission angle; this holds for both the amorphous and crystalline Ge-sample. (iii) The flux of neutral monomers, dimers, and trimers sputtered from Cu(111), Ni(111), and Ag(111) crystals shows a pronouncedly anisotropic emission along the 〈110〉 lattice directions which is ascribed to a momentum alignment in the anisotropic part of the collision cascade. Energy spectra taken along 〈110〉 peak at higher energies than those obtained from a random emission angle.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00619396
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    Paper (German National Licenses)
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  • 5
    Electronic Resource
    Electronic Resource
    Sputtering yields of nickel and chromium (1989)
    Springer
    Applied physics 49 (1989), S. 711-717 
    Details
    ISSN: 1432-0630
    Keywords: 79.20.−m
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The sputtering yield of polycrystalline nickel and chromium was determined as a function of projectile energy (1–8 keV), projectile mass (N+, Ne+, Ar+, Xe+), angle of incidence (0°–75°), and oxygen partial pressure. Where theoretical values exist, the agreement is reasonable.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00616998
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    Paper (German National Licenses)
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  • 6
    Electronic Resource
    Electronic Resource
    On the influence of reactive gases on sputtering and secondary ion emission (1978)
    Springer
    Applied physics 16 (1978), S. 271-278 
    Details
    ISSN: 1432-0630
    Keywords: 79.20 ; 61.80
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract As a continuation of earlier sputtering yield measurements in an ion microprobe, the influence of oxygen and nitrogen on sputtering yield, ionisation efficiency and depth resolutions has been studied. For inert gas bombardment the yield of Ti and V falls sharply at a certain oxygen exposure. While this decrease in yield can be correlated with an increase in surface binding energy in the case of titanium, cone formation causes the yield to drop for oxygen exposed vanadium. In contrast, during nitrogen bombardment the only effect of oxygen exposure is a drastic increase of the ionisation efficiency; the sputtering yield or the depth resolution Δz/z is hardly influenced by oxygen coverage. As was observed earlier in the case of Cu−Ni layers, Δz is essentially constant for erosion depthsz≳800 Å, thus yielding better resolution at large depths than is to beexpected from a sequential layer removal model. The extent of the transition zone Δz, is determined by surface topography and thus depends on the target composition as well as its structure.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00885122
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    Paper (German National Licenses)
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  • 7
    Electronic Resource
    Electronic Resource
    Transmission sputtering yields of gold at 6.8 MeV (1976)
    Springer
    Applied physics 11 (1976), S. 289-293 
    Details
    ISSN: 1432-0630
    Keywords: 79.20 ; 61.80
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The transmission sputtering yield of gold for 6.8-MeV Au– bombardment has been measured on targets of thicknesses from 250 to ∼ 7000 Å. The results are compared to Sigmund's theory and to recent calculations of deposited-energy depth distributions by Winterbon. Good agreement between experimental data and theory is found except for target thicknesses around 4000 Å, where the experimental yield rises by up to a factor two higher than predicted by theory. This discrepancy is interpreted in terms of collision spikes, which have been observed previously in backsputtering experiments.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00897068
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    Paper (German National Licenses)
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  • 8
    Electronic Resource
    Electronic Resource
    Determination of the surface segregation of alloys (1989)
    Springer
    Fresenius' Zeitschrift für analytische Chemie 333 (1989), S. 453-455 
    Details
    ISSN: 1618-2650
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology
    Notes: Summary The surface composition of CuPd- and Al-Li-alloys has been investigated by means of ISS and SIMS. Ion-induced and thermally caused segregation of Cu and Li, respectively, has been found.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00572351
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    Paper (German National Licenses)
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