ISSN:
1432-0649
Schlagwort(e):
81.15 Gh
;
82
;
42.60
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Physik
Notizen:
Abstract We have investigated the glow discharge plasma of SiH4−NH3 mixture by CARS. The decomposition rate of NH3 is linearly dependent on SiH4 partial pressure but that of SiH4 is not affected by the mixing ratio.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00697453
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