Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
53 (1988), S. 1198-1200
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We have investigated laser-assisted photochemical etching of InP in aqueous solutions without external electric fields. The process produces highly directional, high-aspect features with smooth vertical walls. Additionally, we demonstrate that the laser etching rate may be controlled externally by the application of a secondary light source.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.100018
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