ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract The duplex nature of Ta2O5 films formed in H3PO4 electrolytes with different concentrations has been chanyotarired by net weight gain measurements of the films during the anodic oxidation, as well by capacitance and etch-rate measurements of the oxide films. The density and permittivity of each layer of the films formed in different concentrations of the electrolyte have been calculated.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01132407
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