Library

X
feed icon rss

Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
  • 1
    Electronic Resource
    Electronic Resource
    Three-dimensional surface measurement using the confocal scanning microscope (1982)
    Springer
    Applied physics 27 (1982), S. 211-213 
    Details
    ISSN: 1432-0649
    Keywords: 06 ; 42.80
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract The use of the depth discriminination property of the confocal scanning microscope for surface profiling has been adapted to provide a method of high-resolution three-dimensional surface profilometry. Measurements on a semiconductor specimen demonstrate the technique; depth variations of the order of 0.1 μm are clearly resolved.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00697444
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 2
    Electronic Resource
    Electronic Resource
    Imaging properties and applications of scanning optical microscopes (1980)
    Springer
    Applied physics 22 (1980), S. 119-128 
    Details
    ISSN: 1432-0630
    Keywords: 42.30 ; 42.80 ; 72.40
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract This review paper is concerned with the imaging properties and major uses of scanning optical microscopes. It is shown that the confocal scanning microscope exhibits a form of super-resolution and that the instrument in general has great application in nonlinear microscopy and the inspection of electronic devices.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00885994
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...