Digitale Medien
Springer
Applied physics
27 (1982), S. 211-213
ISSN:
1432-0649
Schlagwort(e):
06
;
42.80
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Physik
Notizen:
Abstract The use of the depth discriminination property of the confocal scanning microscope for surface profiling has been adapted to provide a method of high-resolution three-dimensional surface profilometry. Measurements on a semiconductor specimen demonstrate the technique; depth variations of the order of 0.1 μm are clearly resolved.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00697444
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