ISSN:
1432-0630
Keywords:
Depth analysis
;
Sputtering
;
Auger spectroscopy
;
SIMS
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract Experimental requirements for a successful application of sputtering techniques for depth profiling are summarized. Evidence is given for the depth resolution expected from the sputtering process. Principles for the evaluation of the concentration-depth relation in SIMS and AES are discussed. Examples of both techniques demonstrate present possibilities for depth analysis.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00901910
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