ISSN:
1432-0630
Keywords:
07.60Fs
;
68.55Jk
;
81.60Bn
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract This paper reports the characterization of both barrier type and porous type anodic oxide films on aluminium by means of spectroscopic ellipsometry (SE). In order to show the capabilities of the technique for quantitative determination of the layer characteristics, results based on ellipsometric data are correlated with complementary information from the analytical techniques transmission electron microscopy (TEM) and Auger electron spectroscopy (AES). It is concluded that ellipsometry yields an accurate characterization for the thicknesses and the interfacial properties of both the barrier layer and the porous layer. The porosity of the porous layer, determined with SE, is found to be in good agreement with the results obtained from TEM.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00348134
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