ISSN:
1432-0630
Schlagwort(e):
79.20
;
34
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract The glancing incidence Rutherford backscattering method is used to study the erosion of aluminium films during bombardment by 10 keV Ar+ ions. It is found that the erosion rate of the firm is about one third the value expected and also that the depth profile of previously implanted 80 ke VPb+ ions changes during the erosion.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00932396
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