ISSN:
1432-0630
Schlagwort(e):
42.5
;
68
;
82.65
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract Reaction rates, particle densities, and temperature distribution in pyrolytic (photothermal) laser-induced microchemical processing are investigated with respect to temperature and concentration-dependent transport coefficients, and with respect to the effect of thermal diffusion. While the model employed is particularly suitable for laser-induced chemical vapor deposition (LCVD), it can also be applied to many cases of laser-induced surface modification and dry-etching.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00323596
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