Library

feed icon rss

Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
  • 1
    Electronic Resource
    Electronic Resource
    Springer
    Applied physics 46 (1988), S. 249-253 
    ISSN: 1432-0630
    Keywords: 68.55 ; 73.60 ; 77.55
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The low-temperature fabrication of silicon nitride films by ArF excimer laser irradiation has been studied. Two fabrication methods are presented. One is photo-enhanced direct nitridation of a silicon surface with NH3 for very thin gate insulators, and the other is photo-enhanced deposition of silicon nitride films with Si2H6 and NH3 gases for stable passivation films. The ArF excimer laser irradiation dissociates the NH3 gas producing NH and NH2 radicals which proved effective in instigating the nitridation reaction. The quality of both films has been much improved and the growth temperature has been lowered by using laser irradiation. These photo-enhanced processes seem to be promising ULSI techniques because they do not depend on high temperatures and are free from possible reactor contamination.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 2
    Electronic Resource
    Electronic Resource
    Springer
    Applied physics 46 (1988), S. 249-253 
    ISSN: 1432-0630
    Keywords: 68.55 ; 73.60 ; 77.55
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The low-temperature fabrication of silicon nitride films by ArF excimer laser irradiation has been studied. Two fabrication methods are presented. One is photoenhanced direct nitridation of a silicon surface with NH3 for very thin gate insulators, and the other is photo-enhanced deposition of silicon nitride films with Si2H6 and NH3 gases for stable passivation films. The ArF excimer laser irradiation dissociates the NH3 gas producing NH and NH2 radicals which proved effective in instigating the nitridation reaction. The quality of both films has been much improved and the growth temperature has been lowered by using laser irradiation. These photo-enhanced processes seem to be promising ULSI techniques because they do not depend on high temperatures and are free from possible reactor contamination.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 3
    Electronic Resource
    Electronic Resource
    New York, NY [u.a.] : Wiley-Blackwell
    Journal of Applied Polymer Science 33 (1987), S. 2403-2409 
    ISSN: 0021-8995
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: The temperature dependence of the CO2 permeability coefficient in poly(vinyl acetate) (PVAc) was measured continuously by a differential permeation rate method. Tg was changed at upstream pressure in PVAc/CO2 system, and curious behavior of Ar was observed after CO2 conditioning. The differential permeation rate experiment successfully exhibits the effects of continuous temperature change for membranes with different histories.
    Additional Material: 6 Ill.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 4
    Electronic Resource
    Electronic Resource
    Bognor Regis [u.a.] : Wiley-Blackwell
    Journal of Polymer Science Part B: Polymer Physics 24 (1986), S. 121-131 
    ISSN: 0887-6266
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Physics
    Notes: The precise pressure dependence of apparent diffusion and permeation coefficients was measured by using a microcomputer system for collecting and treating permeation data for CO2 in glassy poly(ethylene terephthalate) below 1 atm between 15 and 40°C. The partial immobilization model was used to determine the dual-mode sorption and mobility parameters. The curves calculated with these parameters were in excellent agreement with experimental data. These parameters were also compared with sorption parameters obtained from measurements at 30°C. There was a small difference between the values of the parameters obtained from these permeation data and those from sorption data which we had previously obtained. Relations between this difference and the method of determination of the parameters are discussed.
    Additional Material: 7 Ill.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 5
    Electronic Resource
    Electronic Resource
    New York, NY [u.a.] : Wiley-Blackwell
    Journal of Applied Polymer Science 14 (1970), S. 2295-2303 
    ISSN: 0021-8995
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: The presence of adhesive residue on the surface of various adherends after peeling has been confirmed using a tracer technique. Adhesive bonding is found to break by a cohesive mechanism, although the unbonding process seems apparently to be due to intersurface failure. This result supports the concept for adhesive bond breaking proposed in the preceding paper: The unbonding proceeds from the viscoelastic deformation of the adhesive mass around the wetted spots on the surface. As the number of spots in a unit area is controlled by surface energy, the tack value is dependent on the critical surface tension of the adherends.
    Additional Material: 4 Ill.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 6
    Electronic Resource
    Electronic Resource
    New York, NY [u.a.] : Wiley-Blackwell
    Journal of Applied Polymer Science 14 (1970), S. 2039-2048 
    ISSN: 0021-8995
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: It has been found that tack values of pressure-sensitive adhesives are dependent on the surface energies for adherends. The parabolic curves with maxima are obtained from the plots of tack values versus critical surface tensions for the substrates. The maximum occurs at the region where the two surface tensions are almost similar. On the other hand, tack is measured as a dynamic value indicated as the force necessary to deform the adhesive mass. To explain why the tack values is controlled by the surface character of the adherend, a mechanism is proposed for adhesive bond breaking. Primarily, bonding occurs by wetting the surface with adhesive. When the adhesive bond breaks by external force, unbonding proceeds from the viscoelastic deformation of the adhesive mass around the wetted spots on the surface of the adherend. As the total area of wetted spots is determined by surface energy, the tack value is dependent on the critical surface tension of the adherend.
    Additional Material: 7 Ill.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 7
    Electronic Resource
    Electronic Resource
    New York : Wiley-Blackwell
    Journal of Polymer Science: Polymer Chemistry Edition 19 (1981), S. 2185-2194 
    ISSN: 0360-6376
    Keywords: Physics ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Notes: The polymerization of cyclohexene oxide was investigated with a new catalyst system of Al(acac)3- silanol compounds. Catalyst activity varied with the ratio of silanol/Al(acac)3 and the structure of silanol compounds. Catalyst deactivation appeared to be caused by self-condensation of silanol and the addition of silanol to the epoxy ring. Polymer structure was investigated by 13C-NMR spectroscopy and x-ray diffraction. The mechanism of the polymerization appears to be cationic.
    Additional Material: 4 Ill.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 8
    Electronic Resource
    Electronic Resource
    New York : Wiley-Blackwell
    Journal of Polymer Science: Polymer Chemistry Edition 19 (1981), S. 2541-2550 
    ISSN: 0360-6376
    Keywords: Physics ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Notes: The polymerization of cyclohexene oxide with Al(acac)3-silanol catalyst supported by zeolite and porous silica has been investigated. Cyclohexene oxide was also polymerized to a lesser extent by a zeolite-silanol catalyst and an Al(acac)3-silica gel catalyst. The catalytic activity of the zeolite-silanol system varied with the zeolite pore size. The catalytic activity of the Al(acac)3-silanol system was enhanced by supporting the catalyst with porous silica or zeolite. The Al(acac)3-silanol catalyst supported by zeolite was especially effective in increasing polymer conversion and molecular weight. Catalytic activity increased with increasing chemical interaction between silanol and porous silica. The molecular weight of the polymers with these catalysts increased in the order zeolite-silanol〉 zeolite-Al(acac)3-silanol 〉Al(acac)3-silanol ≈ Al(acac)3-silanol supported by porous silica〉Al(acac)3-silica gel.
    Additional Material: 9 Ill.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 9
    Electronic Resource
    Electronic Resource
    New York : Wiley-Blackwell
    Journal of Polymer Science: Polymer Chemistry Edition 20 (1982), S. 1433-1443 
    ISSN: 0360-6376
    Keywords: Physics ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Notes: A new catalyst system (Ph3SiCOPh-aluminum complex-alcohol) was investigated for photopolymerization of cyclohexene oxide. Polymer conversion and molecular weight increased with polymerization time. When a Ph3SiCOPh-Al (n-Praa)3-alcohol catalyst system was used the catalyst activity decreased, depending on the alcohol: i-PrOH 〉 n-PrOH 〉 i-BuOH 〉 MeOH 〉 t-BuOH 〉 H2O. When the Ph3SiCOPh-Al complex-i-PrOH catalyst system was used the catalyst activity decreased, depending on the ligand of the Al complex: ß-ketoester 〉 orthocarbonyl phenol 〉 ß-diketone. Benzophenone derivatives were effective for catalyst activation as a photosensitizer.
    Additional Material: 3 Ill.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 10
    Electronic Resource
    Electronic Resource
    New York : Wiley-Blackwell
    Journal of Polymer Science: Polymer Chemistry Edition 20 (1982), S. 1652-1652 
    ISSN: 0360-6376
    Keywords: Physics ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Additional Material: 1 Tab.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...