ISSN:
1432-0630
Schlagwort(e):
07.65
;
07.80
;
68.55
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract The structural and compositional properties of undoped SIPOS thin films have been studied by spectroscopic ellipsometry and transmission electron microscopy. It is shown that in most cases the former method provides fast and reliable results. The growth rate and crystallinity of SIPOS layers are studied as a function of N2O concentration in the gas phase and annealing temperature.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00331521
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