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  • 68.55.+b  (2)
  • 72.40  (1)
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  • 1
    Electronic Resource
    Electronic Resource
    Springer
    Applied physics 51 (1990), S. 508-514 
    ISSN: 1432-0630
    Keywords: 68.55.+b ; 61.70.T ; 73.60.Fw ; 73.20.Hb
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Acceptor doping of MBE grown Ga0.47In0.53As on InP:Fe substrates utilizing manganese is investigated as an alternative for overcoming problems related to beryllium doping. The incorporation behaviour of manganese is analyzed in detail with respect to its application in optoelectronic device structures. Special emphasis is put on low-level and maximum-level doping relevant for use in buffer and contact layers, respectively. The dependence of activation energy and the degree of ionization on acceptor concentration is determined. At high doping levels the free-hole concentration is markedly lower than the doping concentration. It is attributed to the diffusion of acceptor species across the heterointerface into the substrate. Manganese diffusion is demonstrated to be an important effect for the interpretation of the measurement results. Manganese doping is applied in p+/n/p−-layer structures for junction field effect transistor applications. The intended abruptness of acceptor profiles is deteriorated by diffusion of manganese in the Ga0.47In0.53As material. The degraded device characteristics obtained are attributed to the acceptor diffusion behaviour established.
    Type of Medium: Electronic Resource
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  • 2
    ISSN: 1432-0630
    Keywords: 68.55.+b ; 72.20.-i ; 78.55-m
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Combined Hall effect and low-temperature photoluminescence measurements have been used to perform a thorough evaluation of the growth temperature dependence of Ge incorporation in GaAs during molecular beam epitaxy (MBE) over the entire substrate temperature range (400°≦T s ≦600[°C]) practicable forn-type layer growth. Using a constant As4 to Ga flux ratio of two, growth below 500°C yieldsn-GaAs: Ge films having electrical and optical properties rapidly deteriorating with decreasingT s . Growth at 500° ≦T s ≦600[°C] produces high-qualityn-GaAs: Ge films (N D /N A ≈4) with C as well as Ge residual acceptors competing on the available As sites. The amount of Ge atoms on As sites [GeAs] increases with substrate temperature, whereas simultaneously the amount of C atoms on As sites [CAs] decreases thus leading to the well-establishednonlinear behaviour of the (N A /N D vs. 1/T s plot. Counting the incorporated Ge impurities separately, however, yields alinear behaviour of the ([GeAs]/[GeGa]) vs. 1/T s plot which has exactly the same slope as the (P As 2/P Ga) vs. 1/T s plot derived from vapour pressure data of As2 and Ga over solid GaAs surfaces. The important result is, therefore, that the incorporation behaviour of Ge in GaAs during molecular beam epitaxy is directly correlated with theevaporation behaviour of the growing GaAs surface.
    Type of Medium: Electronic Resource
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  • 3
    ISSN: 1432-0630
    Keywords: 72.20.F ; 72.20.J ; 72.40 ; 72.80.E
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The persistent photoconductivity effect in Si-dopedn-Al x Ga1−x As layers grown by molecular beam epitaxy on (100)GaAs substrates has been investigated by detailed Halleffect and capacitance measurements at 10–300 K. In the alloy composition range 0.25〈x 〈0.40 the electrical properties ofn-Al x Ga1−x As are governed by a deep electron trap having an emission barrier of 0.34–0.40 eV (depending on the doping concentration), as determined by admittance measurements. The concentration of deep electron traps, deduced from low-temperature capacitance measurements, is found to coincide with the amount of persistent photoconductivity observed in the material. Consequently, the earlier proposed population of two-dimensional subbands at the Al x Ga1−x As/GaAs-substrate hetero-interface, i.e. charge separation bymacroscopic barriers, can not account for the measured high overall number of persistent photoexcited carriers. Instead, the vanishing small capture rates of photoexcited electrons result frommicroscopic capture barriers. The dominant deep electron trap, which we attribute to deep donor-type (DX) centers, is found to be homogeneously distributed throughout the Al x Ga1−x As layer depth. From our Hall effect measurements a trap depth of 0.05–0.12 eV (depending on the doping concentration) below the conduction band is derived. The capture barrier is thus in the order of 0.30 eV. This value is in excellent agreement with data obtained from liquid phase epitaxially grown Si-dopedn-Al x Ga1−x As.
    Type of Medium: Electronic Resource
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