ISSN:
1432-0630
Keywords:
78.30-j
;
68.55+b
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract It is shown that Raman spectroscopy can provide useful information on characteristic properties of thin crystalline films of compound semiconductors. Crystal orientation, carrier concentration, scattering times of charge carriers, composition of mixed crystals and depth profiles can be studied in thin layers and heterostructures of GaAs and AlxGa1−xAs. The advantages and disadvantages of Raman scattering compared to conventional characterization methods are discussed.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00885858
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