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Lateral growth rates in laser CVD of microstructures (1984)

Petzoldt, F. ; Piglmayer, K. ; Kräuter, W. ; [et al.]

Springer

Applied physics 35 (1984), S. 155-159

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ISSN: 1432-0630

Keywords: 42.60−v ; 81.15.Gh ; 61.55.Fe

Source: Springer Online Journal Archives 1860-2000

Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics

Notes: Abstract Lateral growth rates of Ni spots deposited on absorbing substrates by decomposition of Ni(CO)4 with visible Kr+ laser light have been measured. The experimental data are consistent with the calculated temperature distributions. The mechanism of decomposition is thermal with an apparent chemical activation energy of 22±3 kcal/mole for the temperature range 350 K≦T≦500 K.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1007/BF00616969

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