ISSN:
1432-0649
Keywords:
82.50
;
82.65
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
Notes:
Abstract Model calculations on laser-induced photolytic gas-phase processing have shown that the concentrations of photogenerated species and the reaction rates depend not only on the electronic properties of precursor molecules and on the wavelength and intensity of the laser excitation, but also on the size of the laser focus, the type of the substrate material and, significantly, on the material and geometry of the reaction chamber. In particular, it has been demonstrated that a dependence of the reaction rate,W, on the radius of the laser beam on the substrate surface,w o, according toW∝w 0 −n cannot be employed, in general, in a simple way to separate adsorbed-phase and gas-phase contributions to the reaction rate as claimed in previous investigations. Even in pure photolytic gas-phase processing, the exponentn can vary within the range 0〈n〈=2, depending on the various different parameters and material properties.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00694679
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