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  • 1
    Digitale Medien
    Digitale Medien
    Determination of C-atom density downstream an Ar-CH4 rf plasma torch (1995)
    Springer
    Plasma chemistry and plasma processing 15 (1995), S. 221-230 
    Details
    ISSN: 1572-8986
    Schlagwort(e): C atom density determination ; gas temperature determination ; flowing post-discharge
    Quelle: Springer Online Journal Archives 1860-2000
    Thema: Chemie und Pharmazie , Maschinenbau , Technik allgemein
    Notizen: Abstract Nitrogen, oxygen, and carbon atoms have been detected by optical emission spectroscopy in a common flowing post-discharge of an Ar-x CH4 rf plasma torch and an Ar-2%N2 microwave discharge. Gas temperature as determined from CN and N2 rotational svstems is 3200 ± 200 K in the rf torch and 700 ± 100 K in the post-discharge at a time 3 X10−2 s after the rf plasma torch. From the intensities of the N2 1st positive system, of NO, and of CN violet hands, the atom densities have been determined as 2 X 1016 cm3 for N, 1015 cm3 for O, and 6 X 1012 cm3 for C in the post-discharge at p=650 torr, with 103 of CH4 in the Ar torch.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1007/BF01459697
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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  • 2
    Digitale Medien
    Digitale Medien
    Production of N, H, and NH active species in N2-H2 dc flowing discharges (1995)
    Springer
    Plasma chemistry and plasma processing 15 (1995), S. 721-731 
    Details
    ISSN: 1572-8986
    Schlagwort(e): Laser-induced fluorescence ; flowing dc discharge ; N2-H2 mixture
    Quelle: Springer Online Journal Archives 1860-2000
    Thema: Chemie und Pharmazie , Maschinenbau , Technik allgemein
    Notizen: Abstract Densities of N, H, and NH active species have been detected by laser-induced fluorescence (LIF) in N2-xH2 dc flowing discharges. A peak value of N atom densities far x = 0.2–0.5% and a plateau value of H atom densities between x = 1% and 90% in post-discharge conditions (Δ∼0.05 sec, p = 2 torr) has been found. Comparison between LIF measurements of N atoms and the trend of the N2(B, v = II) population shows that the emission from this state can be used for monitoring N atoms. The NH radical has only been detected inside the discharge region.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1007/BF01447069
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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