ISSN:
0741-0581
Keywords:
Thin films
;
Substrates
;
Carbon evaporation
;
Clean vacuum
;
Electron energy loss spectroscopy
;
X-ray microanalysis
;
Life and Medical Sciences
;
Cell & Developmental Biology
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Natural Sciences in General
Notes:
A compact, oil-free vacuum system has been assembled for the production of thin carbon films. Carbon rods are held in a simply constructed and easily cleaned rod holder. Using an unlubricated mechanical roughing pump and one sorption pump, the system is evacuated to the low millitorr range while completely avoiding oil vapors and contaminants that might derive from pump oil. Films produced in such systems are hydrophilic, and analytical electron microscopy measurements have shown that these films are adequately smooth and free of contaminants of both high and low atomic number.
Additional Material:
4 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/jemt.1060050205
Permalink