ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
Recent mathematical approximations of φ(ρz), the depth distribution of electron-excited x-rays, have opened up the possibility of accurate quantitative analysis of thin-film specimens by electron beam techniques. This method has been used extensively in electron probe microanalysis. This paper demonstrates quantitative analyses of thin films using energy-dispersive x-ray analysis (EDS) coupled with the φ(ρz) method. Metal and oxide films were analyzed by several techniques, including electron probe microanalysis (EPMA), Rutherford backscattering spectroscopy (RBS), x-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM), spectroscopic ellipsometry (SE) and x-ray fluorescence spectroscopy (XRF); the results were compared with those obtained from the EDS thin-film analysis. In the case of Al2O3 films, EDS film thickness results agree to within ±4%, ±7% and ±9% of the TEM, EPMA and SE results, respectively. For metal films, the EDS results agree to within ±12% (thicknesses) and ±7% (composition) of the RBS, EPMA and XRF results.
Additional Material:
1 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740200204
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