ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
Electron beam effects on Si(100) and 5% Fe/Cr alloy samples have been studied by measurements of the secondary electron yield δ, determination of the surface composition by Auger electron spectroscopy and imaging with scanning electron microscopy. Variations of δ as a function of the accelerating voltage Ep (0.5〈Ep〈5 ke V), of the spot diameter φ (1 μm〈φ〈200 μm) and of the electron bombardment time t can be represented by simple expressions. The variations mainly affect the very low energy range of the n(E) distribution and correspond to volume phenomenon and surface effect. Impurities diffusing into or out of the irradiated regions cause changes in the contrast of scanning electron microscopy images at low bombardment levels. In contrast, the Auger electron spectroscopy peaks are modified only at high damage levels. The residual vacuum lower than 10 -9 Torr has no effect on technological samples covered with their reaction layers; the sensitivities to the beam depend rather on the earlier mechanical, thermal and chemical treatment of the surfaces.
Additional Material:
12 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740010606
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