ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
A model is presented to interpret the results of XPS electron take-off experiments obtained for natural oxide films on polycrystalline tantalum. The high-resolution spectrum of Ta 4f shows signals from Ta, TaO and Ta2O5. The angle variations of the intensity ratios Ta2O5/Ta and TaO/Ta show that the emitted signals came from three successive layers: Ta bulk, TaO at the interface and Ta2O5. The stoichiometry and thickness of the derived layers agree with the intensity ratio calculation obtained using a modelization where the interface is not homogeneous but made by large clusters of TaO (height 20 ± 4 Å, fractional coverage 0.56 ± 0.07). The surface is covered by 30 Å of Ta2O5, a value nearly equal to the sputtering result of Mathieu and Landolt.
Additional Material:
4 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740180403
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