ISSN:
1573-4900
Keywords:
Modeling
;
Simulation
;
Laser annealing and ablation
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Summary Microstructure evolution in an amorphous layer of Si (a-Si) irradiated by pulsed lasers has been investigated using a two-dimensional heat-conduction, phase-change, and microstructure simulation model. The approach has several unique features for describing nonequilibrium phase transformations under the extreme conditions of pulsed-laser annealing and ablation, e.g., the concepts of the state diagram and the state array. The approach has been used to study several problems related to the annealing and ablation of solids by pulsed lasers, e.g., (i) dynamics of ‘explosively’ propagating buried liquid layers during pulsed-laser annealing of an a-Si layer on a c-Si substrate; (ii) dynamics of Si ‘flake’ nucleation and growth and the resulting final microstructures for various laser energy densities;, (iii) ablation due to absorption by localized but extended defects such as occurs in the case of MgO; (iv) particulate ejection during laser ablation and matrix-assisted laser desorption ionization (MALDI). The results from the modeling and simulation are compared to experimental measurements and observations. Quantitative and qualitative agreement between experiment and theory demonstrate that the approach can be applied to a variety of problems and for many different materials.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01185659
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