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  • Polymer and Materials Science  (1)
  • VLSI  (1)
  • 1
    Electronic Resource
    Electronic Resource
    New York, NY : Wiley-Blackwell
    Journal of Electron Microscopy Technique 11 (1989), S. 62-69 
    ISSN: 0741-0581
    Keywords: TEM sample preparation ; VLSI ; semiconductor processing ; Defect analysis ; Life and Medical Sciences ; Cell & Developmental Biology
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Natural Sciences in General
    Notes: A cross-sectional sample preparation technique is described that relies on lithographic and dry-etching processing, thus avoiding metallographic polishing and ion milling. The method is capable of producing cross-sectional transmission electron microscopy samples with a large amount of transparent area (1 μm × 2.5 mm) which allows the examination of many patterned test sites on the same sample from the same chip of a silicon wafer. An example of the application of the technique is given for localized oxidation through a mask.
    Additional Material: 10 Ill.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
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  • 2
    Electronic Resource
    Electronic Resource
    New York : Wiley-Blackwell
    Journal of Polymer Science Part A-1: Polymer Chemistry 6 (1968), S. 2359-2375 
    ISSN: 0449-296X
    Keywords: Physics ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Notes: The polymerization of ethylene with Ziegler-Natta catalysts in the presence of carbon black has shown three characteristic features both with a heterogeneous catalyst, AlBu3—TiCl4, and with a soluble catalyst, Cl2Ti(C5H5)2—AlEt2Cl. They are, in order of increasing importance: reactivity of the organoaluminum derivatives with surface chemical groups of the carbon black, adsorption of a certain amount of organoaluminum compounds on the carbon black surface, and influence of the specific surface of carbon black, which controls the dispersion degree of the catalytic system. Furthermore, it was possible to obtain polyethylene by this procedure, containing different amounts and different types of carbon black.
    Additional Material: 13 Ill.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
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