ISSN:
1572-8986
Keywords:
C atom density determination
;
gas temperature determination
;
flowing post-discharge
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Technology
Notes:
Abstract Nitrogen, oxygen, and carbon atoms have been detected by optical emission spectroscopy in a common flowing post-discharge of an Ar-x CH4 rf plasma torch and an Ar-2%N2 microwave discharge. Gas temperature as determined from CN and N2 rotational svstems is 3200 ± 200 K in the rf torch and 700 ± 100 K in the post-discharge at a time 3 X10−2 s after the rf plasma torch. From the intensities of the N2 1st positive system, of NO, and of CN violet hands, the atom densities have been determined as 2 X 1016 cm3 for N, 1015 cm3 for O, and 6 X 1012 cm3 for C in the post-discharge at p=650 torr, with 103 of CH4 in the Ar torch.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01459697
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