ISSN:
1572-9605
Schlagwort(e):
MOCVD
;
YBCO thin films
;
mixed precursor
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Elektrotechnik, Elektronik, Nachrichtentechnik
,
Physik
Notizen:
Abstract Single-phase YBa2Cu3O7−δ thin films withT c values around 90 K are readily obtained by using a single-source chemical vapor deposition technique with normal precursor mass transport. The quality of the films is controlled by adjusting the carrier gas flow rate and the precursor feed rate.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00730402
Permalink