Electronic Resource
Amsterdam
:
Elsevier
Microelectronic Engineering
7 (1987), S. 91-101
ISSN:
0167-9317
Keywords:
Ion milling
;
computer simulation
;
ion beam etching
;
process modeling
;
redeposition
;
sputtering
;
trenching
Source:
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:
Electrical Engineering, Measurement and Control Technology
Type of Medium:
Electronic Resource
URL:
http://linkinghub.elsevier.com/retrieve/pii/0167-9317(87)90007-4
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