ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
A novel misalignment offset reduction technique is extended in order to separate a piezoresistive voltage, from the Hall voltage, in doubly connected Hall elements based on silicon. In a special configuration, this method exploits directional averaging using biaxial current injection from four electrically separate current sources in order to cancel in situ the stress-generated off-diagonal piezoresistive voltage across the Hall voltage contacts. Measurements suggest field-equivalent offsets below 1 mT in (001) surface n-Si devices with current injection in the [110] direction. © 1995 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.115110
Permalink